Furnace Structure
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- The furnace is consistent with four-tube furnace modules with alumina tube 50 OD x 460 L, mm
- Each heating module's temperature is controlled independently up to 1500°C
- Quickly sealed flange, Vacuum gauge, and flowmeter are installed to allows heat treatment under vacuum or flowing gas
- Processing 4 samples with different temperature at compact space
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Heating Element |
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Working Temperature & Constant Temperature Zone
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- Continuous Working Temperature 1400°C
- Maximum Working Temperature 1500°C (< 1 hrs)
- /- 10°C @ 1300°C in the center 120mm area
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Processing Tube
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- High purity alumina tube with Φ50X L 460 mm, 4 tubes included
- 4 flowmeters are included
- The quickly clamped flange of KF25 with mechanical vacuum gauge and needle valves
- Max. Vacuum 10^-5 torr by a turbopump
- Only one vacuum pump required via a KF25 port. Click the picture below to choose a vacuum pump
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Temperature Control |
- Eurotherm 3000 Series Programmable Temperature Controller
- Includes over-temperature and broken thermal couple alert.
- 4 channel heating tube is controlled independently by 24 segments programmable temperature controller
- 4 S type Thermal Couple
- Includes RS485 Communication port and PC control software, which can control and record the temperature of all 4 channel heater by one Laptop.
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Heating Rate
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Temperature Accuracy
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Temperature Uniformity
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- /- 10°C @ 1300°C in a 120mm zone in length
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Power & Working Voltage
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- 12 KW, 208 - 240V single phase, 50/60Hz ( if 4 heating modules operation at the same time )
- Three-phase, AC 380V - 460V available upon request.
- Note Power cable included but without a plug. Please install a plug on your own. You may purchase a plug from your local hardware store or browse our catalog for a .
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Compliance |
- CE Certified
- NRTL (UL61010) or CSA certification is available upon request at extra cost.
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Dimension
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800 L x 680 W x 1000 H, mm ( Pls click Pic to see details) |
Warranty
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- One year limited warranty with lifetime support
- We reserve the right to upgrade the furnace structure for better performance without notice
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Operation Instruction
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Warning & Application note
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- Max pressure of this furnace is 7.5 PSI 0.5 atm). You must install a pressure regulator on your gas tank to avoid over-pressured.
- This furnace also can be modified as a larger CVD furnace system with a . Please contact us to discuss your special application.
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