| Furnace Structure
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- The furnace is consistent with six-tube furnace modules with quartz tube 50 OD x 460 L, mm
- Each heating module's temperature is controlled independently up to 1200°C
- Quickly sealed flange, Vacuum gauge, and flowmeter are installed to allow heat treatment under vacuum or flowing gas
- Processing six batches of samples with different temperatures at compact space
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| Heating Element |
- Ni-Cr-Al- resistance wire
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Working Temperature
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- Max.Working Temperature 1200°C
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Processing Tube
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- High purity quartz tube with Φ50X L 460 mm, 6 tubes included
- 4 flowmeters are included
- The quickly clamped flange of KF25 with mechanical vacuum gauge and needle valves
- Max. Vacuum 10^-5 torr by a turbopump
- Only one vacuum pump is required via a KF25 port. Click the picture below to choose a vacuum pump
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| Temperature Control |
- Six digital Programmable Temperature Controllers built-in
- Includes over-temperature and broken thermal couple alert.
- 6 channel heating tube is controlled independently by 24 segments programmable temperature controller
- 6 S type Thermal Couple
- Includes RS485 Communication port and PC control software, which can control and record the temperature of all 4 channel heaters by one Laptop.
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Heating Rate
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Temperature Accuracy
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Power & Working Voltage
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- 10 KW, 208 - 240V single phase, 50/60Hz (if 6 heating modules operate at the same time)
- Note Power cable included but without a plug. Please install a plug on your own. You may purchase a plug from your local hardware store or browse our catalog for a .
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| Compliance |
- CE Certified
- NRTL (UL61010) or CSA certification is available upon request at extra cost.
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Dimension
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1200 L x 680 W x 1000 H, mm ( Pls click Pic to see details) |
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Warranty
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- One year limited warranty with lifetime support
- We reserve the right to upgrade the furnace structure for better performance without notice
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Operation Instruction
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Warning &
Application note
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Max pressure of this furnace is 7.5 PSI 0.5 atm). You must install a pressure regulator on your gas tank to avoid over-pressured.
- This furnace also can be modified as a larger CVD furnace system with a . Please contact us to discuss your special application.
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