Furnace Structure
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The furnace is consistent with six-tube furnace modules with quartz tube 80 OD x 75 ID x 500 L, mm
- Each heating module's temperature is controlled independently up to 1200°C
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Quickly sealed flange, Vacuum gauge, and flowmeter are installed to use under vacuum or flowing gas
- Processing six batches of samples with the different temperatures in a compact space
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| Heating |
- Heating Element: Ni-Cr-Al- resistance wire
- Heating zone Length 300 mm
- Constant temperature zone: ~ 100 mm within /- 1oC
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Working Temperature
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- Max.Working Temperature: 1200° C < 1 hrs
- Continuous working temperature: 1200° C
- Heating rate: 20 °C/ min Max.
- Temperature accuracy: /- 1.0 °C
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Processing Tube &
Vacuum Flange & Flange
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- 4 quartz tubes with Φ80 X 75 ID x L 500 mm, are included
- 4 flowmeters are included KF25 vacuum port is built-in to connect the vacuum pump
- 4 Needle valves for vacuum open or close for each channel and 4 needle valve with 1/4 NPS fitting for gas outlet
- 4 Needle valves with 1.4 1/4" NPS fittings for gas outlet or vacuum are included
- The quickly clamped flange of KF25 with mechanical vacuum gauge and needle valves
- Max. Vacuum 10^-5 torr by a turbopump
- Only one vacuum pump is required via a KF25 port. Click the picture below to choose a vacuum pump
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Temperature Control
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- Touch screen temperature control pane to control 4 channel temperature independently
- Includes over-temperature and broken thermal couple alert.
- 4 channel heating tube is controlled independently by 24 segments programmable
- 4 K type Thermal Couples are included
- Includes RS485 Communication port and PC control software, which can control and record the temperature of all 4 channel heaters by one Laptop.
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Power & Working Voltage
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- 10 KW, 208 - 240V single phase, 50/60Hz
- Total 6 KW max.
- Note Power cable included but without a plug. Please install a plug on your own. You may purchase a plug from your local hardware store or browse our catalog for a .
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Compliance
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- CE Certified
- NRTL (UL61010) or CSA certification is available upon request at extra cost.
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Dimension
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Warranty
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- One year limited warranty with lifetime support
- We reserve the right to upgrade the furnace structure for better performance without notice
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Operation Video
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Warning &
Application note
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- Max pressure of this furnace is 7.5 PSI 0.5 atm). You must install a pressure regulator on your gas tank to avoid being over-pressured.
- This furnace also can be modified as a larger CVD furnace system with a . Please contact us to discuss your special application.
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